Word of the day: Rouleaux

At times, even the smallest entities in the body may arrange themselves to create patterns that are surprisingly ordered. For ...
IEEE

High Rate and Selective Deep Reactive-Ion Etching Process for the Formation of High-Density Vertical Interconnects into Dielectric Build-Up Film

Abstract: In this work, DRIE is applied for the formation of vertical interconnects into the most mainstream dielectric build-up films. For the experiments, Evatec CLUSTERLINE® 600 tool is used that ...