Abstract: The quality of semiconductor fabrication processes is typically degraded by variations in the manufacturing environment, which can be suppressed by run-to-run (R2R) control schemes. The ...
Fractilia, the industry leader in high-accuracy stochastics metrology and control, today announced that its FAME 300(TM) system has been adopted for production use by a top-five semiconductor device ...
Abstract: This article mainly studies the spin-up control of a spinning electrodynamic tether formation (SEDTF) consisting of three linearly distributed nanosatellites connected by two tethers. The ...