Abstract: In this study, we fabricated a limiting current-type microelectromechanical system (MEMS) sensor and evaluated its sensing performance of oxygen and humidity concentration. The MEMS oxygen ...
Densely packed arrays of electrical components called capacitors can form a high-fidelity vibration sensor that can be worn on the skin. Seungjae Lee is in the School of Energy and Chemical ...
Highly Sensitive Capacitive Sensor Based on Injection Locked Oscillators with ppm Sensing Resolution
Abstract: This paper presents the design and the implementation of an ultra-sensitive capacitive sensor based on an injection-locked oscillator architecture able to achieve ppm sensing resolution. The ...
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