Abstract: In this study, we fabricated a limiting current-type microelectromechanical system (MEMS) sensor and evaluated its sensing performance of oxygen and humidity concentration. The MEMS oxygen ...
Densely packed arrays of electrical components called capacitors can form a high-fidelity vibration sensor that can be worn on the skin. Seungjae Lee is in the School of Energy and Chemical ...
Abstract: This paper presents the design and the implementation of an ultra-sensitive capacitive sensor based on an injection-locked oscillator architecture able to achieve ppm sensing resolution. The ...