Abstract: This work reports on the first demonstration of monolithic CFET CMOS co-integrating Middle Dielectric Isolation (MDI), Inner Spacers (ISP) and Stacked frontside patterned Contacts. The flow ...
We all have to-do lists, and sometimes working through them takes longer than we expect. Roughly 15 years ago, I was working on a lot of large-scale building projections and featured some of them in ...
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